Cryo H&I

Korean cryogenic specialist: cryopumps, GM/pulse-tube cryocoolers and helium compressors

LISTEDMANUFACTURER Pyeongtaek, Gyeonggi-do, South Korea

About

Cryo H&I is a Korean cryogenic engineering company that builds cryopumps, cryocoolers, helium compressors and related cryogenic equipment, and runs an overhaul service for vacuum pumps used in semiconductor and display fabs. It was founded in 2020 after taking over the cryopump business of an earlier Korean vacuum company whose roots go back to 2003, and completed its own factory in Pyeongtaek in 2021.

Its in-house cryogenic R&D centre has developed 4 K, 20 K and 80 K cryocoolers (GM and pulse tube types), a smart helium compressor, the GENCRYO smart cryopump and liquid-nitrogen generators, including an explosion-proof 20 K cooler for hydrogen liquefaction.

Products

Cryopumps & Cryo Traps (GENCRYO)
Image: © Cryo H&I

Cryopumps & Cryo Traps (GENCRYO)

Cryogenic vacuum pumps that create high and ultra-high vacuum by condensing and adsorbing gases on surfaces cooled by a two-stage cryocooler. Used where clean, oil-free high vacuum is required.

Key features

  • Two-stage GM or pulse-tube cooling
  • Baffle array and cryopanels for condensation and trapping
  • Charcoal/zeolite adsorbent for hydrogen and helium
  • Regeneration heater for gas desorption
  • Smart cryopump version with monitoring

Applications

  • Semiconductor and display process tools
  • Space and surface-science chambers
  • Quantum technology research
  • High and ultra-high vacuum; 1st stage ~80 K, 2nd stage below 10 K

Request a quote

Cryo H&I

Items

    Tip: tick models in the specification table to add them here.

    Reviewed by Factodex and forwarded in the manufacturer's language. No fees for buyers.