TRI-N Co., Ltd.

Air bearing stages, porous ceramic vacuum chucks and air floating systems for FPD

LISTEDMANUFACTURER Yeongcheon, Gyeongsangbuk-do, South Korea

About

TRI-N was established in 2003 and serves the semiconductor and flat panel display industries. Working from 3D-model-based design, it produces air bearings, ultra-precision linear stages and anti-static porous ceramic products.

Its core technologies include nano-class air bearing stage design, large-area stages, glass inspection machines, high-vacuum-ready stages, porous ceramic manufacturing and resistance-controlled porous ceramic vacuum chucks, backed by its own patents and utility models.

Products

Ultra-Precision Air Bearing Stages
Image: © TRI-N Co., Ltd.

Ultra-Precision Air Bearing Stages

Linear transfer stages riding on vacuum-preloaded porous air bearings for display and semiconductor processes such as laser cutting of tempered glass and flexible substrates. Straightness and yaw are corrected by precision laser measurement.

Key features

  • Vacuum-preloaded porous air bearings
  • Long-term operation without performance loss
  • High load capacity and dynamic stiffness
  • Laser-measured straightness and yaw correction
  • Combined air-bearing and LM-guide axes available

Applications

  • FPD laser cutting equipment
  • Semiconductor process stages
  • Glass inspection machines
  • Stroke to 580 mm; positioning accuracy 0.37 µm; repeatability ±0.15 µm
ModelSeriesStroke (mm)Positioning accuracy (µm)Repeatability (µm)
Top axis (air bearing)Air bearing stage5800.37±0.15
Bottom axis (LM guide)Air bearing stage4700.53±0.47